Low dielectric constant porous materials having improved mechanical strength

The present invention relates to porous materials, typically xerogels or aerogels, having a low dielectric constant but relatively poor mechanical strength. The present invention relates to polymeric coatings, preferably parylene, coated on inorganic xerogels or aerogels so as to increase the mechan...

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Bibliographische Detailangaben
Hauptverfasser:	KELLY JOHN, BENZING JEFFREY C
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CABLES CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS COMPOUNDS THEREOF CONDUCTORS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY INSULATORS MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS METALLURGY NON-METALLIC ELEMENTS ORGANIC MACROMOLECULAR COMPOUNDS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention relates to porous materials, typically xerogels or aerogels, having a low dielectric constant but relatively poor mechanical strength. The present invention relates to polymeric coatings, preferably parylene, coated on inorganic xerogels or aerogels so as to increase the mechanical strength while not substantially degrading the dielectric properties of the resulting coated material. Silica xerogel conformally coated with parylene AF-4 is described.