Calibration method for quantitative elemental analysis

The present invention provides a method of calibrating an analytical tool. The method, in a illustrative embodiment, includes determining a concentration of an element located within a known matrix, obtaining a calibration standard of the known matrix with a polishing process, the calibration standa...

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Hauptverfasser: VARTULI CATHERINE, STEVIE FREDERICK A, GIANNUZZI LUCILLE A
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creator VARTULI CATHERINE
STEVIE FREDERICK A
GIANNUZZI LUCILLE A
description The present invention provides a method of calibrating an analytical tool. The method, in a illustrative embodiment, includes determining a concentration of an element located within a known matrix, obtaining a calibration standard of the known matrix with a polishing process, the calibration standard being representative of the concentration, and obtaining a detection limit of an analytical tool with respect to the concentration. Furthermore, secondary ion mass spectrometry may be used to determine the concentration of the element within the known matrix.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title Calibration method for quantitative elemental analysis
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