Calibration method for quantitative elemental analysis

The present invention provides a method of calibrating an analytical tool. The method, in a illustrative embodiment, includes determining a concentration of an element located within a known matrix, obtaining a calibration standard of the known matrix with a polishing process, the calibration standa...

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Bibliographische Detailangaben
Hauptverfasser:	VARTULI CATHERINE, STEVIE FREDERICK A, GIANNUZZI LUCILLE A
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	The present invention provides a method of calibrating an analytical tool. The method, in a illustrative embodiment, includes determining a concentration of an element located within a known matrix, obtaining a calibration standard of the known matrix with a polishing process, the calibration standard being representative of the concentration, and obtaining a detection limit of an analytical tool with respect to the concentration. Furthermore, secondary ion mass spectrometry may be used to determine the concentration of the element within the known matrix.