Heterojunction bipolar transistor

A heterojunction bipolar transistor includes an emitter or collector region of doped silicon, a base region including silicon-germanium, and a spacer. The emitter or collector region form a heterojunction with the base region. The spacer is positioned to electrically insulate the emitter or collecto...

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Bibliographische Detailangaben
Hauptverfasser: KING CLIFFORD ALAN, FREI MICHEL RANJIT, MA YI, MASTRAPASQUA MARCO, NG KWOK K
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A heterojunction bipolar transistor includes an emitter or collector region of doped silicon, a base region including silicon-germanium, and a spacer. The emitter or collector region form a heterojunction with the base region. The spacer is positioned to electrically insulate the emitter or collector region from an external region. The spacer includes a silicon dioxide layer physically interposed between the emitter or collector region and the remainder of the spacer.