Driver and method of operating a micro-electromechanical system device

A driver for use with a micro-electromechanical system (MEMS) device, method of operation thereof and a MEMS device employing the driver and method. In one embodiment, the driver includes an actuation subsystem that provides an actuation voltage to alter an angle of an optical element of the MEMS de...

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Bibliographische Detailangaben
Hauptverfasser:	GASPARYAN ARMAN, CHAN EDWARD
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERATION MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORTING
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Beschreibung
Zusammenfassung:	A driver for use with a micro-electromechanical system (MEMS) device, method of operation thereof and a MEMS device employing the driver and method. In one embodiment, the driver includes an actuation subsystem that provides an actuation voltage to alter an angle of an optical element of the MEMS device. The driver also includes a bias subsystem, coupled to the actuation subsystem, that applies a bias voltage between the optical element and the actuation subsystem, thereby reducing the actuation voltage.