Method and device for making a metal bump with an increased height

A device for making metal bumps includes a hard conical tubular member having a vertical conical passage at an upper portion thereof, a bell shaped chamber at a lower portion thereof which is larger than the vertical conical passage in diameter, located under and communicated with the vertical conic...

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Bibliographische Detailangaben
Hauptverfasser: LEU WEN-LONG, HU CHIAIEH, CHANG CHUNG-MING, CHEN HUI-PIN, TU FENGANG, HUANG FU-YU, HUANG NING, CHANG HSUAN-JUI, CHIANG HUA-WEN, SHIEH WEN-LO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A device for making metal bumps includes a hard conical tubular member having a vertical conical passage at an upper portion thereof, a bell shaped chamber at a lower portion thereof which is larger than the vertical conical passage in diameter, located under and communicated with the vertical conical passage, and a circular recess which is larger than the bell shaped chamber in diameter, located under and communicated with the bell shaped chamber, thereby forming a capillary tube with a surface.