Device and a method for heat treatment of an object in a susceptor

A device for heat treatment of an object comprises a susceptor (9) having walls (10) surrounding an inner room (11) adapted to receive the object and Rf-field radiating means (12, 15) arranged outside the walls and adapted to heat the walls and by that said object. Said means comprises at least two...

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Bibliographische Detailangaben
Hauptverfasser: LOEFGREN PETER, LIU YUJING
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A device for heat treatment of an object comprises a susceptor (9) having walls (10) surrounding an inner room (11) adapted to receive the object and Rf-field radiating means (12, 15) arranged outside the walls and adapted to heat the walls and by that said object. Said means comprises at least two coils (12, 15) with at least one turn each following upon each other in a longitudinal direction of the susceptor and a current source (17) arranged to cause a current to flow in each coil in a direction of rotation around the susceptor walls opposite to that of the other coil for heating said walls.