Focused ion beam system

There is disclosed a focused ion beam (FIB) system which has an ion gun equipped with no suppressor electrode but which produces a regulated emission current. The extraction voltage is controlled to regulate the emission current. The FIB system has a control system that controls the extraction volta...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	SAKAGUCHI KIYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	There is disclosed a focused ion beam (FIB) system which has an ion gun equipped with no suppressor electrode but which produces a regulated emission current. The extraction voltage is controlled to regulate the emission current. The FIB system has a control system that controls the extraction voltage as a function of (i) the difference between a measured current and a target current, (ii) the accumulated emission time from the last flashing of an emitter to the present time, and (iii) an accumulated emission pause time during which no emission is performed.