Manual wafer lift
A wafer lift for lifting a series of vertically oriented wafers arranged parallel to one another in a cassette. The wafer lift includes a vertically movable ramp and a cassette guide positioned over the ramp. The ramp is raised to engage wafers in a cassette supported on the guide so that each wafer...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A wafer lift for lifting a series of vertically oriented wafers arranged parallel to one another in a cassette. The wafer lift includes a vertically movable ramp and a cassette guide positioned over the ramp. The ramp is raised to engage wafers in a cassette supported on the guide so that each wafer is lifted incrementally higher than the preceding wafer. |
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