Method of producing zinc oxide thin film, method of producing photovoltaic device and method of producing semiconductor device
The present invention provides a method of producing a zinc oxide thin film in which a current is passed between a conductive substrate immersed in an aqueous solution containing at least zinc ions and carboxylic acid ions, and an electrode as an anode immersed in the aqueous solution to form a zinc...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The present invention provides a method of producing a zinc oxide thin film in which a current is passed between a conductive substrate immersed in an aqueous solution containing at least zinc ions and carboxylic acid ions, and an electrode as an anode immersed in the aqueous solution to form a zinc oxide thin film on the conductive substrate. This method stabilizes formation of the zinc oxide thin film and improves adhesion between the thin film and the substrate. |
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