Layer configuration with a material layer and a diffusion barrier which blocks diffusing material components and process for producing a diffusion barrier

Layer configuration with a material layer and a diffusion barrier which blocks diffusing material components and process for producing a diffusion barrier

A layer configuration includes a material layer and a diffusion barrier which blocks diffusing material components. The barrier is disposed in the vicinity of a layer boundary of the material layer and is formed predominantly in grain boundaries of the material layer. A process for producing a diffu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DEHM CHRISTINE, MAZURE-ESPEJO CARLOS
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A layer configuration includes a material layer and a diffusion barrier which blocks diffusing material components. The barrier is disposed in the vicinity of a layer boundary of the material layer and is formed predominantly in grain boundaries of the material layer. A process for producing a diffusion barrier is also provided.