Megasonic cleaner

A transducer is coupled either directly in a linear relationship, or remotely in an angular relationship, to a focusing element. The transducer and focusing element preferably extend a length at least equal to the diameter of a substrate to be cleaned thereby. The transducer and focusing assembly im...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: FISHKIN BORIS
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A transducer is coupled either directly in a linear relationship, or remotely in an angular relationship, to a focusing element. The transducer and focusing element preferably extend a length at least equal to the diameter of a substrate to be cleaned thereby. The transducer and focusing assembly impart focused megasonic energy to a fluid in contact therewith. Three embodiments of a cleaning system which advantageously employ the transducer/focuser assembly are disclosed. The transducer/focuser assemblies preferably focus megasonic energy in a line across the substrate's surface, the substrate is then scanned past the lines of energy such that the substrate's entire surface is cleaned.