Micro fusible link for semiconductor devices and method of manufacture

An electrically activated fuse with a high melting point heater element in series with a low melting point fusible link. The heater element has a higher resistivity and larger cross-sectional area than the fusible link in order to withstand heat that the heater element generates bringing the fusible...

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Bibliographische Detailangaben
Hauptverfasser: PALAGONIA ANTHONY M, MARMILLION PATRICIA E, SCHMIDT DENNIS A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An electrically activated fuse with a high melting point heater element in series with a low melting point fusible link. The heater element has a higher resistivity and larger cross-sectional area than the fusible link in order to withstand heat that the heater element generates bringing the fusible link to its melting point. Fuse dimensions (width and length) are each between 0.1 and 2.0 microns, with a thermal mass of the heater element being sufficient to melt the fusible link.