Fluorescent X-ray analyzer useable as wavelength dispersive type and energy dispersive type

A fluorescent X-ray analyzing apparatus capable of being used as either a wavelength dispersive type or an energy dispersive type is provided, with which the analysis can be performed quickly and accurately. The fluorescent X-ray analyzing apparatus includes a detecting unit for detecting and analyz...

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Hauptverfasser: ARAKE AKIRA, INOUE MINORU, KAWAHARA NAOKI, AOYAGI KOUICHI, SAKAMOTO TAKASHI, MISONOO TAKASHI, SHOJI TAKASHI, YAMADA YASUJIRO
Format: Patent
Sprache:eng
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Zusammenfassung:A fluorescent X-ray analyzing apparatus capable of being used as either a wavelength dispersive type or an energy dispersive type is provided, with which the analysis can be performed quickly and accurately. The fluorescent X-ray analyzing apparatus includes a detecting unit for detecting and analyzing fluorescent X-ray (5) emitted from at least one target area (1a) of a sample (1) to be analyzed as a result of excitation of such target area (1a) with a primary X-ray (3). The detecting unit includes a wavelength dispersive type detecting unit (6) including a spectroscope (8) and a first detector (9), and an energy dispersive type detecting unit (11) including a second detector (12) of an energy dispersive type. The angle theta1 formed between a first path (81) of travel of the fluorescent X-ray from the target area (1a) towards the spectroscope (8) and a surface of the sample (1) is equal to the angle theta2 formed between a second path (82) of travel of the fluorescent X-ray from the target area (1a) towards the second detector (12) of the energy dispersive type and a surface of the sample (1), but the second path (82) is shorter than the first path (81).