Electrostatic chuck with improved temperature control and puncture resistance

Apparatus for supporting a workpiece and method of making same. The apparatus comprises a flex circuit laminated to a contoured support pedestal. The flex circuit includes a reinforced layer to improve puncture resistance of the flex circuit. The top surface of the chuck has a contoured topography t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KHOLODENKO ARNOLD, BEDI SURINDER, CLINTON JON, KATS SEMYON, SHERSTINSKY SEMYON, SHAMOUILIAN SHAMOUIL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES
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