Method of fabrication of highly resistive GaN bulk crystals

The method of fabrication of highly resistive GaN bulk crystals by crystallization from the solution of atomic nitrogen in the molten mixture of metals, containing gallium in the concentration not lower than 90 at. % and the Periodic Table group II metals: calcium, beryllium or in the concentration...

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Hauptverfasser: LESZCZYNSKI MICHAL, GRZEGORY IZABELLA, BOCKOWSKI MICHAL, SUSKI TADEUSZ, POROWSKI SYLWESTER, KRUKOWSKI STANISLAW, WROBLEWSKI MIROSLAW, LUCZNIK BOLESLAW
Format: Patent
Sprache:eng
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Zusammenfassung:The method of fabrication of highly resistive GaN bulk crystals by crystallization from the solution of atomic nitrogen in the molten mixture of metals, containing gallium in the concentration not lower than 90 at. % and the Periodic Table group II metals: calcium, beryllium or in the concentration of 0.01-10 at. %, at the temperature 1300-1700° C., under the nitrogen pressure 0.5-2.0 GPa and in the presence of temperature gradient characterized by the temperature gradient not higher than 10° C./cm.