Method, apparatus and computer program product for identifying electrostatic discharge damage to a thin film device

Method, apparatus and computer program product for identifying electrostatic discharge damage to a thin film device

A method, apparatus and computer program product for identifying electrostatic discharge (ESD) damage to a thin film device. The method includes (1) determining a cold resistance of the thin film device, (2) determining a hot resistance of the thin film device, (3) calculating a heating delta resist...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YEH CHIN-YU, LUO JIH-SHIUAN, SMITH ROBERT LANGLAND
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A method, apparatus and computer program product for identifying electrostatic discharge (ESD) damage to a thin film device. The method includes (1) determining a cold resistance of the thin film device, (2) determining a hot resistance of the thin film device, (3) calculating a heating delta resistance (HDR) from the hot and cold resistances and (4) comparing the HDR to a threshold value to ascertain if the thin film device has suffered ESD damage. The HDR of the thin film device is characterized by the following relationship: HDR=(hot resistance-cold resistance)/(cold resistance).