Method for producing a predetermined resist pattern

A method for producing a predetermined resist pattern on e.g. a lithographic printing plate, circuit board or mask, comprises the patternwise exposure to suitable radiation of a composition which comprises a novolac resin and a diazonium salt. The composition is rendered preferentially soluble to a...

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Bibliographische Detailangaben
Hauptverfasser: MCCULLOUGH CHRISTOPHER DAVID, RAY KEVIN BARRY
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for producing a predetermined resist pattern on e.g. a lithographic printing plate, circuit board or mask, comprises the patternwise exposure to suitable radiation of a composition which comprises a novolac resin and a diazonium salt. The composition is rendered preferentially soluble to a developer in the regions which were exposed.