Method and apparatus for inspection of a substrate by use of a ring illuminator

A method and apparatus for the inspection of a substrate provides consistent detection of defects such as cracks, differentiates between different types of defects, and, does not excessively heat the substrate. An infrared radiating source produces infrared energy which illuminates the substrate in...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	CHOU MAU-SONG, CHODZKO RICHARD A, CASEMENT L. SUZANNE, ARENBERG JONATHAN W
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A method and apparatus for the inspection of a substrate provides consistent detection of defects such as cracks, differentiates between different types of defects, and, does not excessively heat the substrate. An infrared radiating source produces infrared energy which illuminates the substrate in a uniform manner at an incident angle. An infrared camera collects a portion of the infrared light which is reflected from the substrate. An image is created from the collected light which includes indicia of the defect. The image is examined as the incident angle is varied for changes in the appearance of the indicia.