Process for fabricating fluorine-doped sol-gel article

The invention reflects discovery of a liquid phase doping technique that, unlike previous techniques, exhibits very little fluorine depletion upon subsequent heating. The invention involves the steps of providing a silica sol comprising a tetraalkylammonium hydroxide and a di-, tri-, or tetraalkylammonium fluoride, the sol having pH of about 10 to about 14, adding a gelling agent to the sol to induce gelation, casting or extruding the sol to form a gel body, and then drying, heat treating, and sintering the body. Advantageously, the fluorine-containing compound is tetramethylammonium fluoride.