On-chip misalignment indication

An on-chip misalignment indicator for measuring misalignment between layers of an integrated circuit die employs a first contact, and a second contact. A current path between the first and second contacts having a resistance that varies as a function of misalignment between successive layers of the...

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1. Verfasser: SUGASAWARA EMERY
Format: Patent
Sprache:eng
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Zusammenfassung:An on-chip misalignment indicator for measuring misalignment between layers of an integrated circuit die employs a first contact, and a second contact. A current path between the first and second contacts having a resistance that varies as a function of misalignment between successive layers of the integrated circuit die. Similarly, a method for detecting misalignment between layers of an integrated circuit die involves passing and measuring a current between a first contact. The amount of the current being indicative of an amount of misalignment between layers of the integrated circuit die.