Diamond-like carbon and oxide bilayer insulator for magnetoresistive transducers

A magnetic structure is formed by depositing a layer of diamond-like carbon onto the exposed surface of an a first material and depositing a layer of second material onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the second layer and is patterned in the for...

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Bibliographische Detailangaben
Hauptverfasser: SCHULTZ ALLAN E, NUNNE WILLIAM H, RUSCELLO L. VINCENT
Format: Patent
Sprache:eng
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Zusammenfassung:A magnetic structure is formed by depositing a layer of diamond-like carbon onto the exposed surface of an a first material and depositing a layer of second material onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the second layer and is patterned in the form of the desire structure. The exposed portions of the second layer are removed with a wet etchant that does not attack the diamond-like carbon layer. Thereafter, any remaining photoresist is removed.