Optical devices having ZNS/CA-MG-fluoride multi-layered mirrors
In a multi-layered dielectric mirror the higher refractive index layers comprise ZnS and the lower refractive index layers comprise a composite of approximately 95%MgF2 and 5%CaF2 by mole fraction. In one embodiment, the fluoride layers are e-beam deposited from an essentially eutectic melt of the t...
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| Zusammenfassung: | In a multi-layered dielectric mirror the higher refractive index layers comprise ZnS and the lower refractive index layers comprise a composite of approximately 95%MgF2 and 5%CaF2 by mole fraction. In one embodiment, the fluoride layers are e-beam deposited from an essentially eutectic melt of the two fluorides. In another embodiment, the semiconductor surface on which the mirror is formed is protected by an aluminum borosilicate glass layer. Application of the invention to the design and fabrication of VCSELs is also described. |
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