Metallic standoff for an electro-optical device formed from a fourth or higher metal interconnection layer

An electro-optical device may be defined using metallic standoffs between a top plate and a substrate, such as a silicon substrate in a liquid crystal on silicon (LCOS) technology. In one embodiment, the metallic standoffs may be formed from a metal layer, such as metal four layer, above the metal l...

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Bibliographische Detailangaben
Hauptverfasser:	MILLER ANTHONY C, RAJ KANNAN
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	An electro-optical device may be defined using metallic standoffs between a top plate and a substrate, such as a silicon substrate in a liquid crystal on silicon (LCOS) technology. In one embodiment, the metallic standoffs may be formed from a metal layer, such as metal four layer, above the metal layer used to form the metal pixel mirrors. In this way, relatively constant and uniform cell thicknesses may be achieved without significantly increasing the processing overhead.