Non-contact electrical conduction measurement for insulating films

A corona source is used to apply charge to an insulating layer. The resulting voltage over time is used to determine the current through the layer. The resulting data determines a current-voltage characteristic for the layer and may be used to determine the tunneling field for the layer.

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Bibliographische Detailangaben
Hauptverfasser: HORNER GREGORY S, MILLER TOM G, VERKUIL ROGER L
Format: Patent
Sprache:eng
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Zusammenfassung:A corona source is used to apply charge to an insulating layer. The resulting voltage over time is used to determine the current through the layer. The resulting data determines a current-voltage characteristic for the layer and may be used to determine the tunneling field for the layer.