Scanning probe microscope with the stage unit

A stage unit used for moving a sample comprises a vertical stage for moving a sample stand in a vertical direction, a horizontal stage for moving the vertical stage in a horizontal direction. In the stage unit, the horizontal stage is fixed on a horizontal slide surface of a surface table and the ve...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ONOZATO HARUMASA, MURAYAMA KEN, MORIMOTO TAKAFUMI, KURODA HIROSHI, SHIRAI TAKASHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INSTRUMENT DETAILS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A stage unit used for moving a sample comprises a vertical stage for moving a sample stand in a vertical direction, a horizontal stage for moving the vertical stage in a horizontal direction. In the stage unit, the horizontal stage is fixed on a horizontal slide surface of a surface table and the vertical stage is slidably arranged on the slide surface. The vertical stage is coupled with the horizontal stage by means of plate springs having strong rigidity in the horizontal direction and weak rigidity in the vertical direction. The whole rigidity of the stage unit is determined only by the vertical stage and is not subject to the effect of the rigidity of the sections included in the horizontal stage and the rigidity of a driving section as to each axis direction. The rigidity of the stage unit can be increased. The standstill rigidity of the stage unit is determined only by the rigidity of the vertical stage. All stages of the stage unit are not piled up. Therefore the height of stage unit can be decreased as low as possible.