Process for the preparation of cyclic ethers containing an o-silylated hydroxyl group

A process is provided which can easily produce a hydroxyl groups-containing cyclic ether compound in which at least one of the hydroxyl groups except a primary hydroxyl group thereof and its neighboring secondary hydroxyl group is protected. A hydroxyl groups-containing cyclic ether is reacted with a difunctional silicon compound represented by the following formula (2)wherein R2 and R3 each represent an aromatic group or a branched aliphatic group having at least 3 carbon atoms and X1 represents a residue of an acid, then with a monofunction al silicon compound represented by the following formula (3)wherein R4, R5 and R6 each represent an aromatic group or an aliphatic group and X2 represents an eliminative group, and then with hydrofluoric acid in the presence of a base.