Method for plasma treatment in hollow bodies

A method for plasma treatment in hollow bodies includes providing a hollow body which has an opening and which is at least partially flexible; evacuating the hollow body with volume contraction to a first pressure which is preselected such that the hollow body, after evacuating and sealing, experien...

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Bibliographische Detailangaben
Hauptverfasser: HOLLAENDER ANDREAS, BEHNISCH JUERGEN
Format: Patent
Sprache:eng
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Zusammenfassung:A method for plasma treatment in hollow bodies includes providing a hollow body which has an opening and which is at least partially flexible; evacuating the hollow body with volume contraction to a first pressure which is preselected such that the hollow body, after evacuating and sealing, experiences a volume expansion in the region of a second pressure, by means of which volume expansion the pressure in the hollow body assumes a value which allows ignition of a non-thermal gas discharge in the hollow body; gas-tight sealing the hollow body while maintaining the first pressure; introducing the hollow body, after evacuating and sealing, into a vacuum chamber; evacuating the vacuum chamber to the second pressure; and igniting a gas discharge in the hollow body after sealing by application of an electrical field.