Gray scale etching for thin flexible interposer
Disclosed is a sculpted probe pad and a gray scale etching process for making arrays of such probe pads on a thin flexible interposer for testing the electrical integrity of microelectronic devices at terminal metallurgy. Also used in the etching process is a novel fixture for holding the substrate...
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| creator | KAMPERMAN JAMES STEVEN EGITTO FRANK DANIEL FOSTER ELIZABETH F FUERNISS STEPHEN JOSEPH MIKALSEN DONALD JOSEPH BASSOUS ERNEST FEILCHENFELD NATALIE BARBARA STONE DAVID BRIAN SCHEUERMANN MICHAEL ROY DAS GOBINDA |
| description | Disclosed is a sculpted probe pad and a gray scale etching process for making arrays of such probe pads on a thin flexible interposer for testing the electrical integrity of microelectronic devices at terminal metallurgy. Also used in the etching process is a novel fixture for holding the substrate and a novel mask for 1-step photolithographic exposure. The result of the invention is an array of test probes of preselected uniform topography, which make ohmic contact at all points to be tested simultaneously and nondestructively. |
| format | Patent |
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Also used in the etching process is a novel fixture for holding the substrate and a novel mask for 1-step photolithographic exposure. 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| subjects | MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| title | Gray scale etching for thin flexible interposer |
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