Gray scale etching for thin flexible interposer

Gray scale etching for thin flexible interposer

Disclosed is a sculpted probe pad and a gray scale etching process for making arrays of such probe pads on a thin flexible interposer for testing the electrical integrity of microelectronic devices at terminal metallurgy. Also used in the etching process is a novel fixture for holding the substrate...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAMPERMAN, JAMES STEVEN, EGITTO, FRANK DANIEL, FOSTER, ELIZABETH F, FUERNISS, STEPHEN JOSEPH, MIKALSEN, DONALD JOSEPH, BASSOUS, ERNEST, FEILCHENFELD, NATALIE BARBARA, STONE, DAVID BRIAN, SCHEUERMANN, MICHAEL ROY, DAS, GOBINDA
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Disclosed is a sculpted probe pad and a gray scale etching process for making arrays of such probe pads on a thin flexible interposer for testing the electrical integrity of microelectronic devices at terminal metallurgy. Also used in the etching process is a novel fixture for holding the substrate and a novel mask for 1-step photolithographic exposure. The result of the invention is an array of test probes of preselected uniform topography, which make ohmic contact at all points to be tested simultaneously and nondestructively.