Centering and holding apparatus and method using inclined surface
An apparatus for centering and holding a substrate including: (a) a substrate holding assembly defining a centerline; and (b) a substrate centering assembly including an alignment member, wherein the alignment member is disposed concentric with the centerline and has an inclined surface that is incl...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | An apparatus for centering and holding a substrate including: (a) a substrate holding assembly defining a centerline; and (b) a substrate centering assembly including an alignment member, wherein the alignment member is disposed concentric with the centerline and has an inclined surface that is inclined in a direction such that upon sliding contact of the substrate with the inclined surface, the substrate moves toward the centerline. |
---|