Centering and holding apparatus and method using inclined surface

An apparatus for centering and holding a substrate including: (a) a substrate holding assembly defining a centerline; and (b) a substrate centering assembly including an alignment member, wherein the alignment member is disposed concentric with the centerline and has an inclined surface that is incl...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SWAIN, EUGENE A
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:An apparatus for centering and holding a substrate including: (a) a substrate holding assembly defining a centerline; and (b) a substrate centering assembly including an alignment member, wherein the alignment member is disposed concentric with the centerline and has an inclined surface that is inclined in a direction such that upon sliding contact of the substrate with the inclined surface, the substrate moves toward the centerline.