Multilayer micro-gas rheostat with electrical-heater control of gas flow
A device and method for controlling small flows of gas, such as would be used by a satellite (or microsatellite) for orientation thrusters includes a photoetched silicon body etched to provide one or more particular flow paths, and optionally filters, where the flow path is defined by the silicon bo...
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| creator | BRUNEAU STEPHEN D REINICKE ROBERT H |
| description | A device and method for controlling small flows of gas, such as would be used by a satellite (or microsatellite) for orientation thrusters includes a photoetched silicon body etched to provide one or more particular flow paths, and optionally filters, where the flow path is defined by the silicon body and a sealing glass layer bonded thereto. Flow is controlled through the flow path(s) by heating the body to decrease the gas flow. |
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| language | eng |
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| subjects | AIRCRAFT AVIATION BLASTING COSMONAUTICS FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES FLUID-PRESSURE ACTUATORS HEATING HYDRAULICS OR PNEUMATICS IN GENERAL LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS TRANSPORTING VEHICLES OR EQUIPMENT THEREFOR WEAPONS |
| title | Multilayer micro-gas rheostat with electrical-heater control of gas flow |
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