Multilayer micro-gas rheostat with electrical-heater control of gas flow

Multilayer micro-gas rheostat with electrical-heater control of gas flow

A device and method for controlling small flows of gas, such as would be used by a satellite (or microsatellite) for orientation thrusters includes a photoetched silicon body etched to provide one or more particular flow paths, and optionally filters, where the flow path is defined by the silicon bo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BRUNEAU, STEPHEN D, REINICKE, ROBERT H
Format: Patent
Sprache:eng
Schlagworte:
AIRCRAFT
AVIATION
BLASTING
COSMONAUTICS
FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES
FLUID-PRESSURE ACTUATORS
HEATING
HYDRAULICS OR PNEUMATICS IN GENERAL
LIGHTING
MECHANICAL ENGINEERING
PERFORMING OPERATIONS
TRANSPORTING
VEHICLES OR EQUIPMENT THEREFOR
WEAPONS
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Beschreibung
Zusammenfassung:A device and method for controlling small flows of gas, such as would be used by a satellite (or microsatellite) for orientation thrusters includes a photoetched silicon body etched to provide one or more particular flow paths, and optionally filters, where the flow path is defined by the silicon body and a sealing glass layer bonded thereto. Flow is controlled through the flow path(s) by heating the body to decrease the gas flow.