Method for forming an asymmetric floating gate overlap for improved device performance in buried bit-line devices
A method of making an electrically erasable non-volatile EPROM memory device and the device itself having an asymmetric floating gate with respect to a buried source region and a buried drain region is disclosed. A patterned floating gate member is formed over a portion of the source region and a po...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A method of making an electrically erasable non-volatile EPROM memory device and the device itself having an asymmetric floating gate with respect to a buried source region and a buried drain region is disclosed. A patterned floating gate member is formed over a portion of the source region and a portion of the drain region producing a floating gate-to-source overlap and a floating gate-to-drain overlap, respectively, such that the floating gate-to-source overlap is less than the floating gate-to-drain overlap. |
---|