Methods for creating a magnetically permeable film

A method for creating a magnetically permeable film on a substrate surface by deposition of successive layers of a magnetic material, during deposition of each layer a magnetic field being provided near said surface having a field direction substantially parallel to the surface. In order to tune the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BLOEMEN, PASCAL J.H, RUIGROK, JACOBUS J.M
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for creating a magnetically permeable film on a substrate surface by deposition of successive layers of a magnetic material, during deposition of each layer a magnetic field being provided near said surface having a field direction substantially parallel to the surface. In order to tune the permeability of the magnetic material the method builds up the magnetically permeable film by forming each layer by depositing a ferromagnetic material to a thickness maximally corresponding to substantially where Lex is equal to with A being the exchange constant of the ferromagnetic material and Ku being the uniaxial anisotropy constant, and changing the magnetic field direction during formation of said layer by an angle other than substantially 180 DEG .