Equipment for producing thin-film solar cell

A thin-film light absorbing layer which is regulated so as to have any desired gallium concentration and which is capable of attaining a high open-circuit voltage is formed by a simple method at a temperature lower than the softening point of the soda-lime float glass. A light absorbing layer is for...

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Bibliographische Detailangaben
Hauptverfasser: KUSHIYA, KATSUMI, TACHIYUKI, MUNEYORI, KASE, TAKAHISA
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A thin-film light absorbing layer which is regulated so as to have any desired gallium concentration and which is capable of attaining a high open-circuit voltage is formed by a simple method at a temperature lower than the softening point of the soda-lime float glass. A light absorbing layer is formed by forming a back electrode on a soda-lime float glass substrate, forming on the back electrode layer a stacked precursor film including a copper-gallium alloy layer and an indium layer by sputtering, and then heating the precursor film in an atmosphere of selenium and/or sulfur.