Method for forming a semiconductor device structure having a laser portion

A heterostructure device includes a ridge-waveguide laser monolithically integrated with a ridge-waveguide rear facet monitor (RFM). An integral V-groove etched directly into the device substrate enables passive alignment of an optical fiber to the active region of the laser. The layer and RFM facet...

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Bibliographische Detailangaben

Hauptverfasser:	NEGRI, ALFRED JOSEPH, ROTHMAN, MARK ALAN, SHIEH, CHAN-LONG, ARMIENTO, CRAIG ALFRED, THOMPSON, JOHN ALVIN
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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