Resolution enhancement by multiple scanning with a low-resolution, two-dimensional sensor array

The system achieves high-resolution imaging with low-resolution two-dimensional imagers whose sensors are only a fraction of a selected pixel area. Sensors are stepped across an image with an optical or mechanical stepper to acquire an image at each sensor position. Thereby, resolution is defined by a step size which is comparable to the sensor size, rather than by pixel resolution. The system thus uses multiple image, obtained from individual sensors, which have a sensed area substantially less than the area of the pixels of the sensor array. Such rescanning is accomplished by movable mirrors or lenses that are disposed between an illuminated specimen and a sensor area.