Suck back valve with sucking amount control mechanism

A suck back valve is equipped with a second valve by which a flow amount of a pressurized fluid, which is sucked by a third diaphragm, is electrically controlled based on an output of activation and deactivation signals from a main controller. The suck back valve further includes an encoder which de...

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Bibliographische Detailangaben
Hauptverfasser: ODAJIMA, KATSUHIKO, KUROSAWA, KENICHI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A suck back valve is equipped with a second valve by which a flow amount of a pressurized fluid, which is sucked by a third diaphragm, is electrically controlled based on an output of activation and deactivation signals from a main controller. The suck back valve further includes an encoder which detects a displacement amount of the third diaphragm, and outputs a detection signal thereof to the main controller.