Vibrating beam accelerometers and methods of forming vibrating beam accelerometers

Accelerometers and methods of forming accelerometers are described. The accelerometers are provided with electrically conductive structure configured for connection with external circuitry. The electrically conductive structure has a folded-back architecture which reduces temperature-induced anomali...

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Bibliographische Detailangaben
Hauptverfasser: LEONARDSON, RONALD B, WOODRUFF, JAMES R
Format: Patent
Sprache:eng
Schlagworte:
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