Vibrating beam accelerometers and methods of forming vibrating beam accelerometers

Vibrating beam accelerometers and methods of forming vibrating beam accelerometers

Accelerometers and methods of forming accelerometers are described. The accelerometers are provided with electrically conductive structure configured for connection with external circuitry. The electrically conductive structure has a folded-back architecture which reduces temperature-induced anomali...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEONARDSON, RONALD B, WOODRUFF, JAMES R
Format: Patent
Sprache:eng
Schlagworte:
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Accelerometers and methods of forming accelerometers are described. The accelerometers are provided with electrically conductive structure configured for connection with external circuitry. The electrically conductive structure has a folded-back architecture which reduces temperature-induced anomalies which can adversely impact acceleration-sensing function of the accelerometer.