Fabrication of UV-sensitive back illuminated CCD image sensors

Fabrication of UV-sensitive back illuminated CCD image sensors

The wafer thickness of a CCD front illuminated silicon wafer is reduced to about ten to twenty microns, the Al substrate is removed and a 5-35 nanometer silicon oxide layer is produced on the thinned back of the silicon wafer followed by implanting boron ions within the back surface to a depth up to...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KOSICKI, BERNARD B, LOOMIS, ANDREW H, GREGORY, JAMES A, SAVOYE, EUGENE D
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The wafer thickness of a CCD front illuminated silicon wafer is reduced to about ten to twenty microns, the Al substrate is removed and a 5-35 nanometer silicon oxide layer is produced on the thinned back of the silicon wafer followed by implanting boron ions within the back surface to a depth up to about ten nanometers. Furnace annealing the wafer is now carried out, and the Al substrate is redeposited to enable the formation of gate contacts.