Device for chemical wet treatment

PCT No. PCT/EP95/05153 Sec. 371 Date Jul. 3, 1997 Sec. 102(e) Date Jul. 3, 1997 PCT Filed Dec. 29, 1995 PCT Pub. No. WO96/21241 PCT Pub. Date Jul. 11, 1996A device for chemical wet treatment of substrates has a tank containing a treatment fluid for treating the substrates. At least one substrate car...

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Hauptverfasser:	SIGEL, HOLGER, SCHULZ, WERNER, DURST, JOHANN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Zusammenfassung:	PCT No. PCT/EP95/05153 Sec. 371 Date Jul. 3, 1997 Sec. 102(e) Date Jul. 3, 1997 PCT Filed Dec. 29, 1995 PCT Pub. No. WO96/21241 PCT Pub. Date Jul. 11, 1996A device for chemical wet treatment of substrates has a tank containing a treatment fluid for treating the substrates. At least one substrate carrier for supporting the substrates within the tank is provided. At least one substrate lifting device for lifting the substrates off the substrate carrier is provided. A lifting apparatus for lifting and lowering the substrate carrier is positioned in the tank. The lifting apparatus has a first transport carriage connected to the substrate lifting device and a second transport carriage connected to a holder of the substrate carrier. The first and second transport carriages are connected to one another by a jointed connection.