Method of forming integrated optical circuit planar waveguide turning mirrors

Planar waveguide turning mirrors in integrated optical circuits are formed using at least one light beam including a wavelength in a particular wavelength range that is absorbed by the cladding layer of the circuit to vaporize a particular region of the corresponding cladding layer at the desired an...

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Bibliographische Detailangaben
Hauptverfasser: PRESBY, HERMAN MELVIN
Format: Patent
Sprache:eng
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Zusammenfassung:Planar waveguide turning mirrors in integrated optical circuits are formed using at least one light beam including a wavelength in a particular wavelength range that is absorbed by the cladding layer of the circuit to vaporize a particular region of the corresponding cladding layer at the desired angle to form the recessed light deflector surface of the turning mirror. In addition, it is also possible to form the cladding layer on a substrate comprising a material that enables light wavelengths in the particular wavelength range to be substantially transmitted through the substrate to advantageously enable greater flexibility in the light beam energy and/or the time the beam is incident on the cladding layer during the vaporization process.