Method for manufacturing a semiconductor ROM device

A semiconductor memory device and a method for manufacturing the same are disclosed. The device includes a plurality of active regions repeatedly formed extending in parallel to each other, a device isolation region, a plurality of first gate electrodes repeatedly arranged being perpendicular to the...

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Hauptverfasser: JUN, SUNG-BU, LEE, WOON-KYUNG
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor memory device and a method for manufacturing the same are disclosed. The device includes a plurality of active regions repeatedly formed extending in parallel to each other, a device isolation region, a plurality of first gate electrodes repeatedly arranged being perpendicular to the active region and device isolation region, a source/drain region formed by being self-aligned ion-implanted into the first gate electrode, active region, and device isolation region, and a second gate electrode located between the first gate electrodes, extending in parallel to the first gate electrode, sharing the source/drain with the first gate electrode, and using the device isolation region as a channel. Thus, cell integration can be enhanced, and high speed operation and excellent yields can be easily ensured.