Process for making ink jet heater chips

A process is disclosed for fabricating a thermal inkjet printhead in which the driving circuitry and heating resistors are incorporated in a single integrated circuit. In the process, a protective cavitation layer, which may contain tantalum, is deposited at the locations of the heating regions over...

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Bibliographische Detailangaben
Hauptverfasser:	BERRY, KAREN L, MANIACI, JOSEPH P
Format:	Patent
Sprache:	eng
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	A process is disclosed for fabricating a thermal inkjet printhead in which the driving circuitry and heating resistors are incorporated in a single integrated circuit. In the process, a protective cavitation layer, which may contain tantalum, is deposited at the locations of the heating regions over a passivation layer and is then patterned prior to any patterning or etching of the passivation layer. A via is then formed in the passivation layer.