Method for local temperature sensing for use in performing high resolution in-situ parameter measurements

Method for local temperature sensing for use in performing high resolution in-situ parameter measurements

An apparatus and method for measuring a parameter of a sample or component at a measurement temperature, wherein the parameter and the measurement temperature are measured at substantially the same time. A temperature coefficient of the sample or component is also established by using temperature fl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DE CEUNINCK, WARD, DE SCHEPPER, LUC, STALS, LAMBERT, ROGGEN, JEAN
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:An apparatus and method for measuring a parameter of a sample or component at a measurement temperature, wherein the parameter and the measurement temperature are measured at substantially the same time. A temperature coefficient of the sample or component is also established by using temperature fluctuations measured at or near the sample at the time at which the parameter is measured. The temperature coefficient is used to correct the measured parameter data and enhance its stability.