Dynamic lot dispatching required turn rate factory control system and method of operation thereof

In a semiconductor manufacturing fabrication plant with production to-order type operation, hundreds of devices and various processes are managed. To provide short cycle time and precise delivery to satisfy customer expectations is a major task. A dispatching algorithm named "Required Turn Rate...

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Bibliographische Detailangaben
Hauptverfasser:	WANG, JIANN-KWANG, HUANG, SHENG-RONG, CHIN, WENNG, LIN, KUON
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	In a semiconductor manufacturing fabrication plant with production to-order type operation, hundreds of devices and various processes are managed. To provide short cycle time and precise delivery to satisfy customer expectations is a major task. A dispatching algorithm named "Required Turn Rate (RTR)" functions according to the level of current wafers in process (WIP) algorithm revising the due date for every lot to satisfy the demand from Master Production Scheduling (MPS). Further the RTR algorithm calculates the RTR of each lot based on process flow to fulfill the delivery requirement. The RTR algorithm determines not only due date and production priority of each lot, but also provides RTR for local dispatching. The local dispatching systems of each working area dispatch the lots by using required turn rate to maximize output and machines utilization.