XY drive apparatus equipped with a linear electromagnetic actuator

An XY drive apparatus is described that is thin and enables the performing of both high-precision and high-speed work. The above advantages are achieved by using flat linear electromagnetic actuators for the driving source that perform high-speed work. In addition, these linear electromagnetic actua...

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Hauptverfasser: TAKEI, SEIJI
Format: Patent
Sprache:eng
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Zusammenfassung:An XY drive apparatus is described that is thin and enables the performing of both high-precision and high-speed work. The above advantages are achieved by using flat linear electromagnetic actuators for the driving source that perform high-speed work. In addition, these linear electromagnetic actuators are arranged on both sides of the apparatus, thereby preventing deviations in operation between both sides to achieve highly accurate positioning.